순도 등급: 의약품 등급, 순도 ≥99.9%
용도: 반도체(LSI) 제조의 산화막 식각용 건식 식각 가스
Purity , %: 99.9
Nitrogen: ≤40 ppmv
Carbon Dioxide: ≤20 ppmv
Carbon Monoxide: ≤7 ppmv
DOT Shipping Name: Liquefied gas, toxic, flammable,n.o.s.(HEXAFLUORO-1,3- BUTADIENE)
DOT Classification: 2.1 , 2.3
DOT Label: Liquefied gas, toxic, flammable
UN Number: UN 3160
CGA/DISS: 638
Shipped as: Liquefied gas
Cylinder State @ 21.1°C: Liquid
Molecular Weight (g/mol): 162.03
Critical Temperature ( °C ): 139.6

기타 정보

추가 설명:

1,3-Hexafluorobutadiene (C4F6, CAS 685-63-21) is a specialty electronic gas supplied at 99.9% purity (MW 162.03), shipped as a liquefied, toxic, flammable gas under UN 3160. It is used as a dry-etching gas in semiconductor (LSI) fabrication, where its lower fluorine-to-carbon ratio generates more CF2 radicals, giving it high selectivity for etching oxide films. Shanghai Wechem Technology Limited manufactures it and distributes it across North America, Europe, Asia, the Middle East, and Africa.