1,3-Hexafluorobutadiene-(C4F6)
Basic Information
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Subcategory & Sub-subcategory
Trade Type
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Product Name
1,3-Hexafluorobutadiene-(C4F6)
Specifications
- Purity Grade: Pharmaceutical Grade, purity ≥99.9%
- Application: Dry-etching gas for oxide-film etching in semiconductor (LSI) manufacturing
- Purity , %: 99.9
- Nitrogen: ≤40 ppmv
- Carbon Dioxide: ≤20 ppmv
- Carbon Monoxide: ≤7 ppmv
- DOT Shipping Name: Liquefied gas, toxic, flammable,n.o.s.(HEXAFLUORO-1,3- BUTADIENE)
- DOT Classification: 2.1 , 2.3
- DOT Label: Liquefied gas, toxic, flammable
- UN Number: UN 3160
- CGA/DISS: 638
- Shipped as: Liquefied gas
- Cylinder State @ 21.1°C: Liquid
- Molecular Weight (g/mol): 162.03
- Critical Temperature ( °C ): 139.6
Other Information
Additional Description:
1,3-Hexafluorobutadiene (C4F6, CAS 685-63-21) is a specialty electronic gas supplied at 99.9% purity (MW 162.03), shipped as a liquefied, toxic, flammable gas under UN 3160. It is used as a dry-etching gas in semiconductor (LSI) fabrication, where its lower fluorine-to-carbon ratio generates more CF2 radicals, giving it high selectivity for etching oxide films. Shanghai Wechem Technology Limited manufactures it and distributes it across North America, Europe, Asia, the Middle East, and Africa.
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