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Product Name

Arsine

Details

Substance

Specifications

  • CAS Number: 7784-42-1 • 7784-42-1
  • Chemical Formula: AsH3
  • IUPAC Name: arsane
  • EC Number: 232-066-3
  • Molecular Weight: 77.946
  • Purity Grade: Industrial grade, 99.999% purity
  • Application: Semiconductor dopant gas (n-type doping of epitaxial silicon; ion implantation)

Other Information

Additional Description:

Arsine (CAS 7784-42-1) is a specialty gas supplied at purities up to 99.9999%, manufactured directly by Shanghai Wechem Technology Limited and shipped as a liquefied, DOT Class 2.3 toxic/flammable gas (UN 2188). It serves primarily as an n-type dopant in semiconductor manufacturing — used in epitaxial silicon deposition and ion implantation to form shallow doped structures such as emitters and source-drain contacts — and is distributed across North America, Europe, Australasia, Asia, the Middle East and Africa.
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