1,3-Hexafluorobutadiene-(C4F6)
基本信息
982
34
12
3.9(51)
类别
交易类型
出售
产品名称
1,3-Hexafluorobutadiene-(C4F6)
规格参数
- 纯度等级: 药用级，纯度≥99.9%
- 用途: 干法蚀刻气体，用于半导体（LSI）制造中的氧化膜蚀刻
- Purity , %: 99.9
- Nitrogen: ≤40 ppmv
- Carbon Dioxide: ≤20 ppmv
- Carbon Monoxide: ≤7 ppmv
- DOT Shipping Name: Liquefied gas, toxic, flammable,n.o.s.(HEXAFLUORO-1,3- BUTADIENE)
- DOT Classification: 2.1 , 2.3
- DOT Label: Liquefied gas, toxic, flammable
- UN Number: UN 3160
- CGA/DISS: 638
- Shipped as: Liquefied gas
- Cylinder State @ 21.1°C: Liquid
- Molecular Weight (g/mol): 162.03
- Critical Temperature ( °C ): 139.6
其他信息
补充描述:
1,3-Hexafluorobutadiene (C4F6, CAS 685-63-21) is a specialty electronic gas supplied at 99.9% purity (MW 162.03), shipped as a liquefied, toxic, flammable gas under UN 3160. It is used as a dry-etching gas in semiconductor (LSI) fabrication, where its lower fluorine-to-carbon ratio generates more CF2 radicals, giving it high selectivity for etching oxide films. Shanghai Wechem Technology Limited manufactures it and distributes it across North America, Europe, Asia, the Middle East, and Africa.
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